STM PDF

Cleanrooms and associated controlled environments - Part 13- Cleaning of surfaces to achieve defined levels of cleanliness in terms of particle and chemical classifications. Original standard ISO 14644-13-2017 in PDF full version. Additional info + preview on request

Document status: Replaced by St ISO 14644-13-2026

Cleanrooms and associated controlled environments - Part 14- Assessment of suitability for use of equipment by airborne particle concentration. Original standard ISO 14644-14-2016 in PDF full version. Additional info + preview on request

Document status: Replaced by St ISO 14644-14-2026

Cleanrooms and associated controlled environments - Part 15- Assessment of suitability for use of equipment and materials by airborne chemical concentration. Original standard ISO 14644-15-2017 in PDF full version. Additional info + preview on request

Document status: Replaced by St ISO 14644-15-2026

Cleanrooms and associated controlled environments - Part 16- Energy efficiency in cleanrooms and separative devices. Original standard ISO 14644-16-2019 in PDF full version. Additional info + preview on request

Document status: Active

Cleanrooms and associated controlled environments - Part 17- Particle deposition rate applications. Original standard ISO 14644-17-2021 in PDF full version. Additional info + preview on request

Document status: Active

Cleanrooms and associated controlled environments - Part 18- Assessment of suitability of consumables. Original standard ISO 14644-18-2023 in PDF full version. Additional info + preview on request

Document status: Active