STM PDF

Cleanrooms and associated controlled environments - Part 2- Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration. Original standard ISO 14644-2-2015 in PDF full version. Additional info + preview on request

Document status: Active

Cleanrooms and associated controlled environments - Part 3- Test methods. Original standard ISO 14644-3-2019 (2020) in PDF full version. Additional info + preview on request

Document status: Active

Cleanrooms and associated controlled environments - Part 4- Design, construction and start-up. Original standard ISO 14644-4-2022 in PDF full version. Additional info + preview on request

Document status: Active

Cleanrooms and associated controlled environments - Part 5- Operations. Original standard ISO 14644-5-2004 in PDF full version. Additional info + preview on request

Document status: Replaced by

Cleanrooms and associated controlled environments - Part 5- Operations. Original standard ISO 14644-5-2025 in PDF full version. Additional info + preview on request

Document status: Active

Cleanrooms and associated controlled environments - Part 6- Vocabulary. Original standard ISO 14644-6-2007 in PDF full version. Additional info + preview on request

Document status: Withdrawn